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DUNA TABLE TOP Series |
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Spin Coater Specifications
- Substrate: Up to 150mm
- Programmable Speed: Up to 5,000 rpm
- Speed Increment: 10 rpm
- Speed Display: Digital (LCD)
- Spin Steps: 10
- Process Recipe: 10 Recipes
- Time: 1-999 sec |
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DUNA 700 Plus Linear Track System
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Specification:
- Wafer Size: up to 200 mm
- SECS-GEM factory automation capable
- Recipe Management & data logging
- Brushless motor and controller
- up to 4 dispense lines per process module
- Topside EBR |
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DUNA 800 Sub-Micron Wafer Pocessing System  |
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Processes
- Sub-micron
- Bump
- Post Passivation
- Solar
- MEMS
- Optoelectric
- Polyimide |
