AIO International Corp.
1938 Junction Avenue,
San Jose CA 95131 U.S.A
PRODUCT<<DUNA
Specification:
# Wafer Size: up to 200 mm
# Recipe Management & data logging
# 99 programs
# Brushless motor and controller
# up to 3 dispenses per Coater module
# Topside EBR
# Bottom side EBR
# Dispense tip bath assy

Options
# Minienviromental system for temperature/humidity control
# Programmable exhaust controller
# SECS factory automation software
# Bar Coder system

 
   
COPYRIGHT@ 2002,AIO(WUXI) MICROSERVICE COMPANY ALL RIGHTS RESERVED.
AIO INTERNATIONAL. TEL:1.(408).586.7667.(USA).sales@aiointernational.com