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Specification:
# Wafer Size: up to 200 mm
# Recipe Management & data logging
# 99 programs
# Brushless motor and controller
# up to 3 dispenses per Coater module
# Topside EBR
# Bottom side EBR
# Dispense tip bath assy
Options
# Minienviromental system for temperature/humidity control
# Programmable exhaust controller
# SECS factory automation software
# Bar Coder system |
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