AIO International Corp.
1938 Junction Avenue,
San Jose CA 95131 U.S.A
PRODUCT<<DUNA
Spin Coater Specifications
＃ Substrate: Up to 150mm
＃ Programmable Speed: Up to 5,000 rpm
＃ Speed Increment: 10 rpm
＃ Speed Display: Digital (LCD)
＃ Spin Steps: 10
＃ Process Recipe: 10 Recipes
＃ Time: 1-999 sec
＃ Vacuum: -80 kPa
＃ Vacuum Connection: 4mm ID/6mmOD
＃ Weight: 16kg
＃ Power: 100-230 VAC
＃ Dimensions (W x H x D): 535 x 182 x 385mm (for 150mm)

Hot Plate Specifications
＃ Substrate: Up to 150mm
＃ Programmable Temperature: 50-200oC
＃ Temperature Control: ?.1oC

Options
＃ Automatic Dispense
＃ High Temperatrue Bake
Specifications
＃ Wafer size: up to 300mm
＃ Spin speed range: - 6000 rpm
＃ Brushless spin motor
＃ Recipe: 10 recipes, 10 steps/recipe

Option: Pump dispense

Specifications
＃ Wafer size: up to 200mm
＃ Programmable Temperature: 50-200oC
＃ Temperature control: ?.1oC


Options:
＃ Pin lifter
＃ High Temperature Option up to 400oC
＃ Digital timer
＃ 3 proximity pins 0.006" high

Automated Spin Coat System
- Spin coater + Wafer transfer robot + Indexer

Specifications:
＃ Wafer size: 150mm or 200mm
＃ Color LCD monitor
＃ User friendly programmability
＃ Spin speed range: -6000 rpm
＃ Back side rinse
＃ Catch-cup exhaust
＃ Dimensions: 16"W x 14"D x 23"H
＃ Weight: 60lb

Available Options:
＃ Automatic pump dispense w/ moving dispense arm
Multiple chemical lines
☆ 3 max. w/ temperature control
☆ 6 max. w/o temperature control
＃ Edge bead removal (Top EBR)
＃ Wafer centering mechanism
＃ Programmable catch-cup cover rinse
＃ Programmable catch-cup splash ring
＃ Programmable catch-cup exhaust
Specifications
＃ Wafer size: 200mm
＃Spin speed range: - 6000 rpm
＃Multiple chemical lines (3 max.)
＃Motorized dispense arm (optional)
＃Pump dispense
＃Single arm wafer transfer robot
＃System footprint: 23" x 43"

Design specification

1. Coater
， Spin speed: 0 - 6000 rpm
， Dispense lines: 3 Max.
， TEBR
， BEBR
， Solvent bath
， Wafer centering mechanism

2. Robot
， Single arm with a vacuum paddle
， X stroke: +/- 14"
， Z stroke: 8"

3. System control
a) Lot operation
b) Unlimited Recipe and Recipe editor
c) Service mode including calibration
d) Alarm, event monitoring & history
e) Touch screen GUI
   
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AIO INTERNATIONAL. TEL:1.(408).586.7667.(USA).sales@aiointernational.com