AIO International Corp.
1938 Junction Avenue,
San Jose CA 95131 U.S.A
PRODUCT<<PUFFIN 100

  

            When drop counts,Count

            on Puffin Dispense System

　

Pump with quick change filter

　

　

 　

　

　

　

Wireless Remote

    Controller

　

　

　

　

　

　

　

Applications:

ØPHOTO

üüPhotoresist

üüPolyimide

üüBumping

üüSOG (Spin on Glass)

　

ØØMIXED FLUID

üüCMP Slurry

ØüDISK & MEDIA

üüDisk Cleaning & Polishing

　

ØØLOW-K DIELECTRICS

　

ØØPROCESS SOLVENTS

üüPositive/Negative Developer

üüEBR (Edge Bead Removal)

üüCatch Cup Bowl Wash

　
BENEFITS

ØØLong-Term Stability- Wafer-to-Wafer Repeatability

ØØAccurate, Bubble-Free Dispense- Process Consistency

ØØNo Routine Maintenance Needed-High Productivity, Uptime

ØØSmall Footprint- Space, Cost reduction

ØØLow Capital Cost- Low Overall Cost of Ownership

　
FEATURES

ØØMulti-dispense/ Dynamic Refill

ØØNo O-rings/ No Diaphragm/ No Bellows

ØØQuick Change Filter and Non-Filter Configurations

ØØReal Time Parameter Setup using IR (wireless)/              Diagnostic   Function

ØØSupport High and Low Viscosity Pumps with One Controller

　

                                        PUMP SPECIFICATIONS
   Dispensing Volume   0.1-10, 0.1-30, 0.1-100ml, Customized Volume Available
   Viscosity Range   1-100cp (Filter Type), 1-3000 (Non-Filter Type)
   Dispense/Suction Flow Rate   0.1-20 ml/sec
   Repeatability of Dispensing Volume    +/- 0.01ml
   Inlet Gas Type   N2
   Pressure   40psi
   Filter (Option)   Quick Exchange Filter Type (Pall EZD 2)
   Pump Size (with controller)   3.33"W x 7.99"H x 8.03"D (w/ Filter), 3.33"W x 7.99"H x 5.55"D (w/o Filter)
                                   CONTROLLER SPECIFICATIONS
   Power   DC 24V, 1A
   Main Control System   LCD Display
  Microprocess and Analog Digital Convert
  RS-485 or RS-232 Serial Connection (Option)
   Remote Control /Device   Built in Controller, IR (wireless) Parameter Set Up by Remote Controller
   Interface with System   Universal Interface
   Operation Mode   Dispense (Auto/Manual)
  Dispense Time/ Dispense Rate
  Suckback Time/Suckback Delay Time (Based on Viscosity)
   Suckback   Digitalized Suckback Control System
   Diagnostic Function   Self Diagnostic Function
   Multi-Dispense   Dynamic RefillTM
   Timer Resolution   50ms (1/20sec) for Driving Pneumatic Valve
   PM Schedule Set Up (Filter Replacement)   Preventive Maintenance Schedule Counter for Filter Replacement
   User Selectable Pump Type   Support High and Low Viscosity with Same Controller

   

COPYRIGHT@ 2002,AIO(WUXI) MICROSERVICE COMPANY ALL RIGHTS RESERVED.
AIO INTERNATIONAL. TEL:1.(408).586.7667.(USA).sales@aiointernational.com