Spin Coater Specifications
¡ñ Double bowls must be necessary
¡ñ Support two cycles-ring and dryer, the cycles are controlled independently.
¡ñ Can store up to 3 preprogrammed recipes, each of which can contain 10
steps or cycles
¡ñ Nirtogen, DI water,heat, resistivity bypass and static eliminator fuction may
be set dependly for the vary steps of cycles.
¡ñ Rotate speed, time and resistivity can be set for the vary steps of cycles.
¡ñ Rotate speed, range: 0~2200rpm.
¡ñ Time range:0~9999sec.
¡ñ Wafer size up to 6
¡ñ Qty: 5 systems available.
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