AIO International Corp.
1938 Junction Avenue,
San Jose CA 95131 U.S.A

RF GENERATOR Repairable List

　
　
MANUFACTURER (OEM) APPLICATION MODEL NO
AE 　 PDW 2200
SPUTTER PDX 900-2V
LAM ETCHER RFG 1250
　 RFG 1251
AMAT CVD RFG(RFDS) 2000-2V
AXCELIS GSD-HE RFG 3000
AXCELIS GSD-HE RFG 3001
NOVELLUS CVD RFG 5500
COMDEL AMAT PVD CPS-1001
　 CS-600AS
　 CX-5000S
TRAZAR
(Cubic RF)		 AKRION WETBENCH SPA400
 AMAT RFG-4
　 All makes and models
HENRY 　 2000D
　 3000D
RFPP 　 LF-10(A)
　 RF-10S
　 RF-20(R, S)
　 RF-20H
　 RF-30S
　 RF-5S
　 LF-5
　 HFS 10,000D
ENI 　 ACG-10(B,T)
　 ACG-3
　 ACG-5(XL)
AMAT ETCH, PVD OEM-12(A, L)
AMAT ETCH, PVD OEM-12B(B3)
TEL ETCH OEM-25(A,N,XL)
　 OEM-6(AM,L,M)
BRANSON BRANSON ICP BARRIER ASHER/ETCHER PM-112
BRANSON ICP PLASMA ASHER PM-132
BRANSON ETCHER PM-119
HUETTINGER 　 Please contact us to see if your model# is repairable by AIO

　

 　
　 　
　 　
　

RF MATCH Repairable List
Category Application PN Description
PHASE IV MXP 0010-09416 ASSEMBLY RF MATCH ETCH
Tungsten Etch 0010-09490 ASSEMBLY RF MATCH BW ETCH BACK
CVD 0010-09750 ASSEMBLY RF MATCH CVD
PVD Preclean 0010-20524 ASSY 8" RF MATCH MODIFIED
0010-20525 ASSY 6" RF MATCH MODIFIED
　 0010-25893 ASSEMBLY, 200MM RF MATCH HIGH EFF
　 0010-29196 ASSEMBLY  200MM RF  MATCH  HGHH  EFF
Etch 0010-30094 Assy, RF Match W/ PEAK Detector, SC/ESC
　 0010-31529 ASSY 6" RF MATCH MODIFIED
MXP+ 0010-36162 OXIDE RF MATCH
DPS Bias 0010-36408 ASSY B49 RF MATCH DPS CHAMBER
HE　 PVD 0010-01776 Assembly RF Match Besc
0010-01929 ASSY,RF MATCH,BIASED ELECTRODE BESC
0010-02113 ASSY,LT BESC RF MATCH
0010-02372 ASSY,HIGH EFF.RF MATCH-BIAS W/ FILTER PCB
0010-02977 ASSEMBLY,RF MATCH,SUB ZERO BESC
IMP 0010-05846 ASSY,HIGH EFFICIENCY RF MATCH-BIAS,300MM VECTRA IMP
　 0010-06018 HE MATCH
　 0010-12112 RF MATCH ASSEMBLY,300MM PCII SUB ZERO BESC
PVD 0010-13627 ASSY,HIGH EFFICIENCY RF MATCH-BIAS
0010-13878 ASSY, PCIIE RF MATCH
0010-15877 ASSY, RF MATCH,BIASED ELECTRODE BESC
　 0010-17337 HE MATCH
Bias 0010-19529 ASSEMBLY,PRECLEAN XTE,RF MATCH-BIAS
　 0010-19589 ASSEMBLY, RF MATCH,300MM SIP ENCORE II CU
PVD 0010-21748 ASSY, RF MATCH 300MM PRECLEAN/RPC PVD
0010-22161 ASSY, HIGH EFF RF MATCH, HTESC PH1
0010-22225 ASSEMBLY, 200MM RF MATCH HIGH EFF
Bias 0010-22498 ASSY, HIGH EFF. RF MATCH-BIAS W/ FILTER PCB 
PVD 0010-24385 Assy, RF Match Biased Electrode Besc, PMR 200mm PVD
Bias 0010-24386 ASSY,HE RF MATCH-BIAS W/FILTER PCB,300MM E2
0010-26180 ASSY, HE RF MATCH-BIAS W/ FILTER PCB,300MM E2
　 0010-29210 RF MATCH ASSM, PEALD 300MM  
Bias 0010-30236 ASSY, HIGH EFF. RF MATCH-BIAS W/ FILTER PCB
Etch 0010-30263 RF MATCH ASSM, METAL ALD 300MM
MXP+ 0010-30686 ASSEMBLY HIGH EFF. RF MATCH-ETCH Mxp+/Emxp+
Bias 0010-33724 ASSY, HIGH EFF. RF MATCH-BIAS W/ FILTER PCB
EMA 0010-39207 Assembly HE RF Match 300mm

　
　
　
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AIO INTERNATIONAL. TEL:1.(408).586.7667.(USA).sales@aiointernational.com